Low power, chip-scale silicon CS-FET multi-gas sensors for toxic and combustible gas

H. Fahad
Serinus Labs, Inc., United States

Keywords: CS-FETs, Chip-Scale Gas Sensors, Edge Computing Devices, Sensitive, Selective, Low Power

Serinus Labs is developing chip-scale, multi-gas sensors that can operate with a few micro-Watts of power for the rapid, sensitive and selective sensing of toxic and combustible gases such as hydrogen sulfide, ammonia, methanethiol, hydrogen and oxygen. Serinus`s core technology platform is based on silicon chemical sensitive transistors (CS-FETs) that are gated by specific interactions between a target gas and a nano-material catalyst layer (metal, metal oxide), where the interaction leads to a work-function change in the latter. Different catalysts can be engineered to be responsive to different gases, enabling simultaneous multiplexed sensing from a single chip. Serinus`s technology will enable mobile and broad area deployed sensing applications at both the civilian and military level, that existing technologies (electrochemical, MOX, optical) and emerging technologies (carbon nanotubes, TMDs, graphene) cannot sufficiently address due to one or more limiting factors such as size, cost, power, sensitivity, selectivity and/or mass producibility. Furthermore, Serinus`s core IP enables the possibility of leveraging back-end-of-line hybrid CMOS/MEMS processes to integrate sensors and compute systems on the same die, potentially removing a cost-performance bottleneck traditionally due to expensive electronic front-ends and packaging.